Nikos Glezos
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1996
1
EE
Nikos Glezos,
Ioannis Raptis
: A fast electron beam lithography simulator based on the Boltzmann transport equation.
IEEE Trans. on CAD of Integrated Circuits and Systems 15
(1): 92-102 (1996)
Coauthor
Index
1
Ioannis Raptis
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1
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Copyright ©
Wed May 28 02:56:03 2008 by
Michael Ley
(
ley@uni-trier.de
)
